
Imec Develops Smallest finFET-based Biosensor
Imec has developed the world’s smallest silicon finFET-based biosensor fabricated using CMOS-compatible technology.
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CIO Applications Europe | Monday, March 15, 2021

Imec has developed the world’s smallest silicon finFET-based biosensor fabricated using CMOS-compatible technology.
Fremont, CA: World-leading research and innovation hub in nanoelectronics and digital technologies Imec developed the smallest silicon finFET that operates as a biosensor. It accomplished ultrasmall dimensions (13nm fin width and 50nm gate length) and was fabricated with a CMOS-compatible process flow. With an illustrated detection limit of tens of molecules today, Imec eventually targets extremely reliable BioFETs sensing single DNA molecules.
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With high integration and low-cost potential, field-effect transistors (FETs) have achieved a lot of attention for biosensing utilisation such as DNA, protein, and virus detection. When biomolecules adhere to the chemically altered dielectric surface of the gate, its threshold voltage fluctuates, giving rise to a measurable signal. Despite constant examination progress in this field, BioFET devices have not yet addressed all their potential into successful commodities. Imec has investigated how an advanced generation of CMOS FET devices, so-called finFETs can improve the responsiveness of BioFETs and open new employment. These finFETS have advantages because of high integration and parallelisation.
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Imec has exhibited a strong signal for DNA hybridisation and the apprehension of tens of DNA molecules on the surface of nano-scale finFETs. Based on investigations and simulation, Imec foretells single-molecule detection with a signal-to-noise (SNR) ratio.
By the unsatisfied desire for ever-faster calculation, Imec has grown to a point where it can now combine a very wide range of nanoscale devices into astonishingly complex arrangements in just a few square millimeters. It is leveraging these capacities to build better computers or communication mechanisms, and to enable chip-based instruments for the life sciences.
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